Epitaxial growth of β-SiC single crystals by successive...

Journal of Crystal Growth 1984 Vol. 70; Iss. 1-2

Epitaxial growth of β-SiC single crystals by successive two-step CVD

Akira Suzuki, Katsuki Furukawa, Yoshiyuki Higashigaki, Shigeo Harada, Shigeo Nakajima, Toshio Inoguchi
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Volume:
70
Year:
1984
Language:
english
Pages:
4
DOI:
10.1016/0022-0248(84)90275-6
File:
PDF, 274 KB
english, 1984
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