Phosphine and arsine decomposition in CVD reactors for InP...

Journal of Crystal Growth 1988 Vol. 92; Iss. 3-4

Phosphine and arsine decomposition in CVD reactors for InP and InGaAs growth

M. Harrous, L. Chaput, A. Bendraoui, M. Cadoret, C. Pariset, R. Cadoret
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Volume:
92
Year:
1988
Language:
english
Pages:
9
DOI:
10.1016/0022-0248(88)90027-9
File:
PDF, 592 KB
english, 1988
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