On the 2D modelling of horizontal CVD reactors and its...

Journal of Crystal Growth 1988 Vol. 91; Iss. 4

On the 2D modelling of horizontal CVD reactors and its limitations

Jalil Ouazzani, Kuan-Cheng Chiu, Franz Rosenberger
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Volume:
91
Year:
1988
Language:
english
Pages:
12
DOI:
10.1016/0022-0248(88)90117-0
File:
PDF, 1.05 MB
english, 1988
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