Effet des conditions expérimentales sur la CVD réactive de...

Journal of Crystal Growth 1989 Vol. 96; Iss. 4

Effet des conditions expérimentales sur la CVD réactive de couches minces de TiC sur carbone

C. Vincent, J. Dazord, H. Vincent, J. Bouix, L. Porte
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Volume:
96
Year:
1989
Language:
french
Pages:
10
DOI:
10.1016/0022-0248(89)90647-7
File:
PDF, 991 KB
french, 1989
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