Effects of growth conditions on thermal profiles during...

Journal of Crystal Growth 1991 Vol. 108; Iss. 1-2

Effects of growth conditions on thermal profiles during Czochralski silicon crystal growth

Kwang Su Choe, Jerry A. Stefani, Theodore B. Dettling, John K. Tien, John P. Wallace
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Volume:
108
Year:
1991
Language:
english
Pages:
15
DOI:
10.1016/0022-0248(91)90373-d
File:
PDF, 1.26 MB
english, 1991
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