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Reaction of Si2H2 molecule on a silicon surface
Yoshio Ohshita, Fumihiko Uesugi, Iwao NishiyamaVolume:
115
Year:
1991
Language:
english
Pages:
5
DOI:
10.1016/0022-0248(91)90803-d
File:
PDF, 352 KB
english, 1991