4H-SiC Epi-Ready Substrate Qualification by Using Mirror...

Materials Science Forum 2020 / 7 Vol. 1004

4H-SiC Epi-Ready Substrate Qualification by Using Mirror Electron Microscope Inspection System

Hasegawa, Masaki, Ohira, Kentaro, Kaneoka, Noriyuki, Ogata, Tomohiko, Onuki, Katsunori, Kobayashi, Kenji, Osanai, Tsutomu, Masumoto, Keiko, Senzaki, Junji
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Volume:
1004
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.1004.369
Date:
July, 2020
File:
PDF, 1.12 MB
2020
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