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Structural Characterization of a Ga2O3 Epitaxial Layer Grown on a Sapphire Substrate Using Cross-Sectional and Plan-View TEM/STEM Analysis
Hashimoto, Ai, Sako, Hideki, Sameshima, Junichiro, Nakamura, Masayuki, Kobayashi, Takayuki, Motoyama, Shinichi, Otsuka, YujiVolume:
1004
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.1004.505
Date:
July, 2020
File:
PDF, 5.63 MB
2020