GaAs milling with neon focused ion beam: Comparison with...

Applied Surface Science 2021 / 02 Vol. 538

GaAs milling with neon focused ion beam: Comparison with gallium focused ion beam milling and subsurface damage analysis

Xia, Deying, Jiang, Ying-Bing, Notte, John, Runt, Doug
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Volume:
538
Journal:
Applied Surface Science
DOI:
10.1016/j.apsusc.2020.147922
Date:
February, 2021
File:
PDF, 7.41 MB
2021
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