Room-temperature deposition of low H-content SiNx/SiNxOy...

Surface and Coatings Technology 2020 / 11 Vol. 402

Room-temperature deposition of low H-content SiNx/SiNxOy thin films using a specially designed PECVD system

Xu, Wei, Tang, Heli, Zhang, Qing-Yu, Zhou, Nan, Shen, Yu
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
402
Journal:
Surface and Coatings Technology
DOI:
10.1016/j.surfcoat.2020.126506
Date:
November, 2020
File:
PDF, 2.89 MB
2020
Conversion to is in progress
Conversion to is failed