Silicide Identification in Rta-Processed Ti Salicide by Analytical Electron Microscopy
Quintero, A., Libera, M., Cabrai, C., Lavoie, C., Harper, J.M.E.Volume:
3
Journal:
Microscopy and Microanalysis
DOI:
10.1017/S1431927600009156
Date:
August, 1997
File:
PDF, 903 KB
1997