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Non Destructive Determination of the Threading Dislocation Density of Smooth Simox Substrates using Atomic Force Microscopy
Domenicucci, A., Murphy, R., Sadanna, D., Klepeis, S.Volume:
6
Journal:
Microscopy and Microanalysis
DOI:
10.1017/S1431927600037934
Date:
August, 2000
File:
PDF, 1.90 MB
2000