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Design and characterization of a polymer electrothermal microgripper with a polynomial flexure for efficient operation and studies of moisture effect on negative deflection
Potekhina, Alissa, Voicu, Rodica-Cristina, Muller, Raluca, Al-Zandi, Muaiyd H. M., Wang, ChanghaiJournal:
Microsystem Technologies
DOI:
10.1007/s00542-020-05086-z
Date:
November, 2020
File:
PDF, 1.20 MB
2020