Multiscale modeling and neural network model based control...

Multiscale modeling and neural network model based control of a plasma etch process

Xiao, Tianqi, Ni, Dong
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Volume:
164
Journal:
Chemical Engineering Research and Design
DOI:
10.1016/j.cherd.2020.09.013
Date:
December, 2020
File:
PDF, 267 KB
2020
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