FTIR studies of the gaseous phase during CVD process

Journal of Molecular Structure 1993 Vol. 294; Iss. none

FTIR studies of the gaseous phase during CVD process

C. Paluszkiewicz, S. Jonas, W.S. Ptak, E. Walasek
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Volume:
294
Year:
1993
Language:
english
Pages:
3
DOI:
10.1016/0022-2860(93)80365-3
File:
PDF, 224 KB
english, 1993
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