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HRTEM Image Simulations for Gate Oxide Metrology
Taylor, S., Mardinly, J., O'Keefe, M.A., Gronsky, R.Volume:
6
Journal:
Microscopy and Microanalysis
DOI:
10.1017/S1431927600037892
Date:
August, 2000
File:
PDF, 1.78 MB
2000