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Field Emission SEM with a Newly Developed FEGUN and Conical Strongly Excited Objective Lens
Kazumori, H., Yamada, A., Mita, M., Nokuo, T., Saito, M.Volume:
6
Journal:
Microscopy and Microanalysis
DOI:
10.1017/s143192760003631x
Date:
August, 2000
File:
PDF, 1.48 MB
2000