AIP Conference Proceedings [AIP ION IMPLANTATION TECHNOLOGY...

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AIP Conference Proceedings [AIP ION IMPLANTATION TECHNOLOGY 2012: Proceedings of the 19th International Conference on Ion Implantation Technology - Valladolid, Spain (25–29 June 2012)] - Sub-2y node NAND flash characteristics using spot beam technology for low energy, high tilt implant for n-poly doping

Ryu, Chong-Il, Lee, Sangsun, Jeon, Young-Ho, Cheon, Youngil, Choi, Jin-Kwan, Yang, Young-Ho, Lee, Kyung-Won, Hong, Rympyo, Yoon, Jong-Yoon, Reece, Ron, Rubin, Leonard M.
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Year:
2012
DOI:
10.1063/1.4766483
File:
PDF, 798 KB
2012
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