Data compilation for depth distribution of ion-induced...

Data compilation for depth distribution of ion-induced damage and ion-implanted atoms

M Terasawa, S Nakahigashi, K Ozawa
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Volume:
128-129
Year:
1984
Language:
english
Pages:
5
DOI:
10.1016/0022-3115(84)90504-x
File:
PDF, 500 KB
english, 1984
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