Surface compositional and chemical-state changes of SiC, Si3N4 and SiO2 by energetic hydrogens
T.A. Sasaki, Y. BabaVolume:
138
Year:
1986
Language:
english
Pages:
4
DOI:
10.1016/0022-3115(86)90269-2
File:
PDF, 305 KB
english, 1986