Detailed measurements of differential sputtering yields by...

Journal of Nuclear Materials 1987 Vol. 145-147; Iss. none

Detailed measurements of differential sputtering yields by ion-beam bombardment using laser fluorescence spectroscopy

Y. Matsuda, S. Matsubaguchi, C. Honda, M. Maeda, T. Okada, Y. Yamamura, K. Muraoka, M. Akazaki
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Volume:
145-147
Year:
1987
Language:
english
Pages:
4
DOI:
10.1016/0022-3115(87)90373-4
File:
PDF, 363 KB
english, 1987
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