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Radiation effects on compound formation in palladium-implanted silicon using a focused ion beam machine
Sridhar Balakrishnan, Krishna Rajan, John C. CorelliVolume:
169
Year:
1989
Language:
english
Pages:
7
DOI:
10.1016/0022-3115(89)90523-0
File:
PDF, 748 KB
english, 1989