Revised formulae for sputtering data

Journal of Nuclear Materials 1995 Vol. 218; Iss. 1

Revised formulae for sputtering data

C. García-Rosales, W. Eckstein, J. Roth
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Volume:
218
Year:
1995
Language:
english
Pages:
10
DOI:
10.1016/0022-3115(94)00376-9
File:
PDF, 626 KB
english, 1995
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