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[ASCE STRESS INDUCED PHENOMENA IN METALLIZATION - Tokyo (Japan) (4-6 Jun 1997)] Fourth international workshop on stress induced phenomena in metallization - Comparisons of constraint effects on Al lines under various passivations
Lee, Samantha, Bravman, John C., Flinn, Paul A., Marieb, Thomas N.Year:
1998
DOI:
10.1063/1.54648
File:
PDF, 989 KB
1998