Optical Properties of the SiOx (x < 2) Thin Films Obtained by Hydrogen Plasma Processing of Thermal Silicon Dioxide
Kruchinin, V. N., Perevalov, T. V., Aliev, V. Sh., Iskhakzai, R. M. Kh., Spesivtsev, E. V., Gritsenko, V. A., Pustovarov, V. A.Volume:
128
Journal:
Optics and Spectroscopy
DOI:
10.1134/S0030400X20100173
Date:
October, 2020
File:
PDF, 933 KB
2020