Tailoring material properties of electrochemically...

Sensors and Actuators A: Physical 2020 / 12 Vol. 316

Tailoring material properties of electrochemically deposited Al film from chloroaluminate ionic liquid for microsystem technology using pulsed deposition

Al Farisi, Muhammad Salman, Tsukamoto, Takashiro, Tanaka, Shuji
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Volume:
316
Journal:
Sensors and Actuators A: Physical
DOI:
10.1016/j.sna.2020.112384
Date:
December, 2020
File:
PDF, 3.01 MB
2020
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