Study of the additives influence in the CMP slurry for the...

Study of the additives influence in the CMP slurry for the surfaces planarisation covered by selective transfer

Ilie, Filip, Ipate, George
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Volume:
14
Year:
2020
Journal:
International Journal of Surface Science and Engineering
DOI:
10.1504/ijsurfse.2020.108209
File:
PDF, 381 KB
2020
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