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Local Atomic Structure in Sb + and Sb + /B + Heavily Implanted Silicon from Fluorescence EXAFS
Allain, J. L., Bourret, A., Regnard, J. R., Armigliato, A.Volume:
32
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/JJAPS.32S2.616
Date:
January, 1993
File:
PDF, 506 KB
1993