VLSI mask optimization: From shallow to deep learning
Yang, Haoyu, Zhong, Wei, Ma, Yuzhe, Geng, Hao, Chen, Ran, Chen, Wanli, Yu, BeiJournal:
Integration
DOI:
10.1016/j.vlsi.2020.11.001
Date:
November, 2020
File:
PDF, 1.53 MB
2020