Langmuir Probe Diagnostics with Optical Emission Spectrometry (OES) for Coaxial Line Microwave Plasma
Chen, Chi, Fu, Wenjie, Zhang, Chaoyang, Lu, Dun, Han, Meng, Yan, YangVolume:
10
Journal:
Applied Sciences
DOI:
10.3390/app10228117
Date:
November, 2020
File:
PDF, 2.80 MB
2020