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Water-assisted femtosecond laser drilling of 4H-SiC to eliminate cracks and surface material shedding
Wang, Wenjun, Song, Hongwei, Liao, Kai, Mei, XuesongJournal:
The International Journal of Advanced Manufacturing Technology
DOI:
10.1007/s00170-020-06262-1
Date:
November, 2020
File:
PDF, 4.94 MB
2020