Selective Area Epitaxy By Metalorganic Chemical Vapor Depositionâ A Tool For Photonic And Novel Nanostructure Integration
Daniel Dapkus, P., Chi, Chun Yung, Choi, Sang Jun, Chu, Hyung Joon, Dreiske, Mitchell, Li, Rijuan, Lin, Yenting, Nakajima, Yoshitake, Ren, Dawei, Stevenson, Ryan, Yao, Maoqing, Yeh, Ting Wei, Zhao, HaJournal:
Progress in Quantum Electronics
DOI:
10.1016/j.pquantelec.2020.100304
Date:
November, 2020
File:
PDF, 3.40 MB
2020
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