Polymeric cantilevered piezotronic strain microsensors...

Sensors and Actuators A: Physical 2020 / 11 Vol. 315

Polymeric cantilevered piezotronic strain microsensors processed by Atomic Layer Deposition

Joly, Raoul, Girod, Stéphanie, Adjeroud, Noureddine, Nguyen, Tai, Grysan, Patrick, Klein, Sébastien, Menguelti, Kevin, Vergne, Christèle, Polesel-Maris, Jérôme
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Volume:
315
Journal:
Sensors and Actuators A: Physical
DOI:
10.1016/j.sna.2020.112280
Date:
November, 2020
File:
PDF, 175 KB
2020
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