Review on recent progress in patterning phase change...

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films 2020 / 12 Vol. 38; Iss. 6

Review on recent progress in patterning phase change materials

Shen, Meihua, Lill, Thorsten, Altieri, Nick, Hoang, John, Chiou, Steven, Sims, Jim, McKerrow, Andrew, Dylewicz, Rafal, Chen, Ernest, Razavi, Hamid, Chang, Jane P.
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Volume:
38
Journal:
Journal of Vacuum Science & Technology A
DOI:
10.1116/6.0000336
Date:
December, 2020
File:
PDF, 3.93 MB
2020
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