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Improvement of running-in process of tetrahedral amorphous carbon film sliding against Si3N4 under humid air by O2 plasma post-irradiation
Kim, Jae-Il, Jang, Young-Jun, Kim, Jongkuk, Jeong, Ji HwanVolume:
538
Journal:
Applied Surface Science
DOI:
10.1016/j.apsusc.2020.147957
Date:
February, 2021
File:
PDF, 8.62 MB
2021