Optical proximity correction using holographic imaging...

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 2014 / 11 Vol. 32; Iss. 6

Optical proximity correction using holographic imaging technique

Isoyan, Artak, Melvin, Lawrence S.
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Volume:
32
Journal:
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
DOI:
10.1116/1.4901417
Date:
November, 2014
File:
PDF, 3.68 MB
2014
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