The effect of substrate bias on the piezoelectric...

Journal of Materials Science: Materials in Electronics 2020 / 11

The effect of substrate bias on the piezoelectric properties of pulse DC magnetron sputtered AlN thin films

Khánh, Nguyen Quoc, Radó, János, Horváth, Zsolt Endre, Soleimani, Saeedeh, Oyunbolor, Binderiya, Volk, János
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Journal:
Journal of Materials Science: Materials in Electronics
DOI:
10.1007/s10854-020-04810-9
Date:
November, 2020
File:
PDF, 1.40 MB
2020
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