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Measurement 2020 / 11

Fast scatterometric measurement of periodic surface structures in plasma-etching processes

Klesse, Wolfgang Matthias, Rathsfeld, Andreas, Groß, Claudine, Malguth, Enno, Skibitzki, Oliver, Zealouk, Lahbib
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Journal:
Measurement
DOI:
10.1016/j.measurement.2020.108721
Date:
November, 2020
File:
PDF, 5.42 MB
2020
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