Mode transition in an oxygen low-pressure, very high frequency (162 MHz), multi-tile electrode capacitively coupled plasma
Harvey, C., Sirse, N., Gaman, C., Ellingboe, A. R.Volume:
27
Journal:
Physics of Plasmas
DOI:
10.1063/5.0022844
Date:
November, 2020
File:
PDF, 1.40 MB
2020