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Study of silicon nitride deposition in III-N MOVPE reactors
Lundin, W.V., Rodin, S.N., Zavarin, E.E., Sakharov, A.V., Zakheim, D.A., Nikolaev, A.E., Tsatsulnikov, A.F.Volume:
551
Journal:
Journal of Crystal Growth
DOI:
10.1016/j.jcrysgro.2020.125906
Date:
December, 2020
File:
PDF, 480 KB
2020