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Study on the Influence of Sapphire Crystal Orientation on Its Chemical Mechanical Polishing
Cao, Linlin, Zhang, Xiang, Yuan, Julong, Guo, Luguang, Hong, Teng, Hang, Wei, Ma, YiVolume:
10
Journal:
Applied Sciences
DOI:
10.3390/app10228065
Date:
November, 2020
File:
PDF, 8.37 MB
2020