Large-Scale and Localized Laser Crystallization of Optically Thick Amorphous Silicon Films by Near-IR Femtosecond Pulses
Bronnikov, Kirill, Dostovalov, Alexander, Cherepakhin, Artem, Mitsai, Eugeny, Nepomniaschiy, Alexander, Kulinich, Sergei A., Zhizhchenko, Alexey, Kuchmizhak, AleksandrVolume:
13
Journal:
Materials
DOI:
10.3390/ma13225296
Date:
November, 2020
File:
PDF, 4.81 MB
2020