On the target surface temperature during dc magnetron...

The European Physical Journal Applied Physics 2020 / 10 Vol. 92; Iss. 1

On the target surface temperature during dc magnetron sputtering

Shaginyan, Leonid R., Shaginyan, Vasily R., Kuzmichev, Anatoly I., Mironov, Mikhail I.
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Volume:
92
Journal:
The European Physical Journal Applied Physics
DOI:
10.1051/epjap/2020200098
Date:
October, 2020
File:
PDF, 496 KB
2020
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