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Micro-Faraday cup array structures fabrication in silicon using deep reactive ion etching
Arab, Julfekar, Dixit, Pradeep, Brahmankar, P.K., Pawade, Raju S., Srivastava, Arvind K.Volume:
9
Year:
2020
Journal:
International Journal of Precision Technology
DOI:
10.1504/ijptech.2020.109760
File:
PDF, 2.04 MB
2020