2D Scanning Micromirror with Large Scan Angle and...

Sensors 2020 / 11 Vol. 20; Iss. 22

2D Scanning Micromirror with Large Scan Angle and Monolithically Integrated Angle Sensors Based on Piezoelectric Thin Film Aluminum Nitride

Meinel, Katja, Melzer, Marcel, Stoeckel, Chris, Shaporin, Alexey, Forke, Roman, Zimmermann, Sven, Hiller, Karla, Otto, Thomas, Kuhn, Harald
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Volume:
20
Journal:
Sensors
DOI:
10.3390/s20226599
Date:
November, 2020
File:
PDF, 15.24 MB
2020
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