CMOS-MEMS Capacitive Tactile Sensor with Vertically...

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Sensors and Actuators A: Physical 2020 / 11

CMOS-MEMS Capacitive Tactile Sensor with Vertically Integrated Sensing Electrode Array for Sensitivity Enhancement

Hsieh, Meng-Lin, Yeh, Sheng-Kai, Lee, Jia-Horng, Cheng, Ming-Ching, Fang, Weileun
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Journal:
Sensors and Actuators A: Physical
DOI:
10.1016/j.sna.2020.112350
Date:
November, 2020
File:
PDF, 3.58 MB
2020
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