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Effects of Protective Capping on Ultra-Thin SIMOX Structures
Wilson, T., Jiao, J., Seraphin, S., Johnson, B., Anc, M., Cordts, B.Volume:
5
Journal:
Microscopy and Microanalysis
DOI:
10.1017/s1431927600017049
Date:
August, 1999
File:
PDF, 2.05 MB
1999