Chromium doping of Ta3N5 thin films via thermal nitridation...

Materials Chemistry and Physics 2021 / 01 Vol. 258

Chromium doping of Ta3N5 thin films via thermal nitridation of sputtered tantalum oxide films

Macartney, Sam, Liu, Rong, Wuhrer, Richard, Sheppard, Leigh R.
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Volume:
258
Journal:
Materials Chemistry and Physics
DOI:
10.1016/j.matchemphys.2020.123838
Date:
January, 2021
File:
PDF, 289 KB
2021
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