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Effect of N 2 /H 2 plasma on the growth of InN thin films on sapphire by hollow-cathode plasma-assisted atomic layer deposition
Alevli, Mustafa, Gungor, NeseVolume:
38
Journal:
Journal of Vacuum Science & Technology A
DOI:
10.1116/6.0000494
Date:
December, 2020
File:
PDF, 2.48 MB
2020