Investigation of vibration-assisted nano-grinding of...

Materials Science in Semiconductor Processing 2021 / 01 Vol. 121

Investigation of vibration-assisted nano-grinding of gallium nitride via molecular dynamics

Huang, Yuhua, Wang, Miaocao, Xu, Yixin, Zhu, Fulong
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Volume:
121
Journal:
Materials Science in Semiconductor Processing
DOI:
10.1016/j.mssp.2020.105372
Date:
January, 2021
File:
PDF, 9.98 MB
2021
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